CMU Nanofabrication Facility

Two cleanrooms of class 100 and class 10 space.
The facility is used by both university personnel and external researchers.
A wide selection of deposition tools including ALD, sputtering, and e-beam evaporation.
Check the calendar for available machine time. Reservations can be made by contacting the staff.
The Nanofab lab will be moving to the new Scott Hall in the Fall of 2016.
The Nanofabrication Facility staff coordinates all activity within the labs.