Nanofab Equipment

The equipment located in the Nanofabrication Facility is listed here with links for more detailed information on each tool. There is a wide selection of process tools including fourteen sputtering systems for thin film development, and a multiplexed ICP RIE system for deep silicon etching of MEMS structures. Sub-micron features are defined with a GCA 4800 wafer stepper and a focused ion beam system with 5nm beam resolution. Optical and electron beam generated masks are designed in house and fabricated at commercial mask making facilities.

You may also be interested in our Nanofab rates sheet.

T H I N F I L M D E P O S I T I O N
Tool	Location
Ultek E-Beam Evaporator	Bay 1
CVC Connexion Sputtering System	Bay 1
Nanofab Sputtering System No. 2	Bay 1
Leybold Z-400 Sputtering System	Bay 3
Leybold Z-650 Sputtering System	Bay 3
Perkin Elmer 2400 6J Sputtering System	Bay 3
Commonwealth Scientific Dual Ion Beam Deposition System	Bay 3
Nanofab Sputtering System No. 1	Bay 4
Nanofab Sputtering System No. 5	Bay 4
Nanofab Sputtering System No. 4	Bay 4
Anelva Sputtering System	Bay 4
Perkin Elmer 2400 8L Sputtering System	Bay 4
Anatech Gold Coater	SEM Room
Leybold Z-400 Sputtering System No. 2	Thin Film Lab II
Nanofab Sputtering System No. 3	Thin Film Lab II
CHA Thermal Evaporator Thin Film Lab II	Thin Film Lab II
Alumina Sputtering System (Under Construction)	Thin Film Lab I
DLC Deposition System (Under Construction)	Thin Film Lab I

D R Y E T C H I N G
Tool	Location
IPC Barrel Etcher	Bay 1
Plasma-Therm 790 RIE System	Bay 1
Surface Technology Systems Multiplex ICP RIE	Bay 2
Commonwealth Scientific Ion Beam Etching System	Bay 3
Micrion 2500 Focused Ion Beam System	FIB Bay

C H E M I C A L M E C H A N I C A L P O L I S H I N G
Tool	Location
Strasbaugh 6EC CMP	Thin Film Lab III
T H E R M A L P R O C E S S I N G
Tool	Location
Oxide Growth Furnace	Bay 2
Silicon Annealing Furnace	Bay 2
Annealing Furnace	Main Corridor
AG Heat Pulse Rapid Thermal Annealer	FIB Bay
Rotating Field Annealing Furnace	Main Corridor
Box Furnace	Thin Film Lab I
Vacuum Annealing System (Under Construction)	Thin Film Lab I
Blue M Oven	Thin Film Lab II

E L E C T R O N B E A M L I T H O G R A P H Y
Tool	Location
FEI Sirion S.E.M./Nabity E-Beam Lithography	SEM Room

P H O T O L I T H O G R A P H Y
Tool	Location
CEE 100CB Spinner/Hotplate	Photolithography Bay
GCA 4800 Wafer Stepper	Photolithography Bay
Photoresist Refrigerator	Photolithography Bay
Karl Suss MA6 Backside Aligner	Photolithography Bay
Karl Suss MJB3 Contact Aligner	Photolithography Bay
Cobilt Contact Aligner	Photolithography Bay
Karl Suss MA56 Contact Aligner	Photolithography Bay
Solitec Photoresist Spinner	Photolithography Bay
Blue M Oven - 90 ºC	Photolithography Bay
Blue M Oven - 120 ºC	Photolithography Bay
Blue M Oven - Variable Temperature	Photolithography Bay
Vacuum Oven	Photolithography Bay
E L E C T R O P L A T I N G
Tool	Location
Copper Electroplating Bath	Thin Film Lab III
I N S P E C T I O N
Tool	Location
FEI Sirion S.E.M./Nabity E-Beam Lithography	SEM Room
Olympus Inspection Microscope	Photolithography Bay
Olympus MX80 Inspection Microscope	Photolithography Bay
Olympus Widefield Zoom Microscope	Photolithography Bay
Olympus Automatic Camera	Photolithography Bay
M E A S U R E M E N T
Tool	Location
KLA Tencor P-15 Profilometer	Bay 1
Tencor Alpha-Step 200 Profilometer	Photolithography Bay
Nanometrics Nanospec 210XP	Main Corridor
Electronic Balance	Thin Film Lab II
W E T C H E M I S T R Y
Tool	Location
8' Wet Bench - Solvents Only (MOS)	Bay 2
8' Wet Bench - Acids Only (MOS)	Bay 2
8' Wet Bench - Solvents Only	Wet Chemistry
8' Wet Bench - Acids Only	Wet Chemistry
4' Wet Bench - Solvents Only	Multiple
Semitool 880 Spin Rinser Dryer	Wet Chemistry
Semitool 870 Spin Rinser Dryer	Wet Chemistry
Ultratech Wafer Scrubber	Thin Film Lab II
Solvent Storage Cabinet & Supply Shelf	Multiple
Glassware Washer	Wet Chemistry
P O S T P R O C E S S I N G
Tool	Location
Kulicke & Soffa 780-6 Dicing Saw	Thin Film Lab I
Diamond Saw	Thin Film Lab I

Carnegie Mellon Nanofabrication Facility
ECE Department
Pittsburgh, PA 15213-3891 USA
412-268-2471 - (FAX) 412-268-4323
copyright 2006 Carnegie Mellon