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Anelva Sputtering System
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| Name | Office | Extension | |
| Fang Chen | REH 332 | x8-2533 | fchen@andrew.cmu.edu |
| Fabian Lee | REH 237 | x8-6611 | zlee@andrew.cmu.edu |
| Hwansoo Lee | REH 337 | x8-4037 | hwansoo@ece.cmu.edu |
| Yi-Kuang Liu | REH 336 | x8-1824 | yikuang@andrew.cmu.edu |
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