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Surface Technology Systems Multiplex ICP RIE
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| Name | Office | Phone | |
| John Neumann | HH 1209 | x8-4404 | jneumann@ece.cmu.edu |
| Xu Zhu | HH 1211 | x8-6606 | xzhu@ece.cmu.edu |
| Seungook Min | REH 147 | x8-4327 | smin@andrew.cmu.edu |
| Suresh Santhanam | HH 3109 | x8-6647 | santh@ece.cmu.edu |
| Cheng-Chieh Hsieh | HH B122 | x8-8871 | chsieh@andrew.cmu.edu |
| Dan Gaugel | HH A206 | x8-1209 | dgaugel@andrew.cmu.edu |
| Michael Lu | HH 1211 | x8-4403 | mslu@ece.cmu.edu |
| Xiaochun Wu | HH 2138 | x8-5239 | xiaochun@andrew.cmu.edu |
| Huikai Xie | HH 1211 | x8-6607 | xie@andrew.cmu.edu |
| Keith Rebello | HH A206 | x8-8194 | rebello@andrew.cmu.edu |
| Fernando Alfaro | EDSH 223 | x8-4858 | falfaro@ri.cmu.edu |
| Hao Luo | HH 3108 | x8-6648 | hluo@andrew.cmu.edu |
| George Lopez | HH 1209 | x8-4405 | glopez@cs.cmu.edu |
| Jeff Zahn | HH A212 | x8-8194 | jzahn@andrew.cmu.edu |
copyright 2006 Carnegie Mellon University |