Cleanroom |
Tour the Cleanroom |
The cleanroom consists of 1,200 square feet of class 10 space and 2,600 square feet of class 100 space. The bay and chase design provides for a flexible and efficient layout of processing tools. The class 10 zone is a yellow light area for photolithography work and is at positive pressure to the class 100 main corridor and four process bays. The class 100 change room is both an air locked entrance and a store for processing supplies. The cleanroom, originally constructed in 1983, recently underwent a major renovation of the HVAC system to ensure consistent and dependable temperature and humidity control throughout the year at 68 ± 1° F and 35% ± 3% relative humidity.
|
| Roberts Engineering Hall Labs |
| The three labs in Roberts Engineering Hall have a bay and chase layout similar to the cleanroom and are outfitted with laminar flow hoods, wet benches and the same house facilities as the cleanroom. These labs are utilized as overflow space for the cleanroom and are generally used for materials studies and thin film development work. |
 | Carnegie Mellon Nanofabrication Facility
ECE Department
Pittsburgh, PA 15213-3891 USA
412-268-2471 - (FAX) 412-268-4323
copyright 2006 Carnegie Mellon |
