New Kid on the Block

The Nanofab cleanroom was modified during the summer of 2000 to provide space for the new CVC Connexion six target sputtering system. A semi-clean service chase was created from office space to house the 9,000 pound GMR chamber, pumps, compressors and power distribution cabinets.

Graduate students began using the machine soon after installation was completed in September. Winnie Yu is using the CVC system to deposit films of FeCo, and optimize their soft properties. These films have the highest magnetization of any known material at room temperature, and will be used for generating fields in magnetic recording heads. Winnie's advisor is Dr. James Bain. Yiming Shi is using the CVC system to deposit GMR (giant magnetoresistive) multilayers of CoFe and Cu to be used in magnetic read heads. He is fabricating a particularly novel structure with these multilayers where the sense current flows perpendicular to the plane of the film for increased sensitivity. Yiming's advisor is Professor Robert White.

Purchase of the instrument was funded, in major part, by NSF grant #EEC-9813977.

Click on photo to see larger view.

The business end of the CVC: central wafer handler and GMR chamber with 6 12" targets.	Yiming Shi loads a wafer into one of 12 available slots in the load lock.	The CVC is computer controlled from the front end.	Under the hood: Winnie Yu and Carsen Kline adjust a cathode magnet.

---

Archived News Articles:

• HVAC System Progress Report
• CVC Connexion Sputtering System
• New HVAC System is Delivered