FIB cross-section of resonator beams from Chiung Lo of Prof. Gary Fedder's group in the MEMS lab, fabricated using the Carnegie Mellon CMOS-MEMS process (ASIMPS).
Carnegie Mellon Nanofabrication Facility ECE Department Pittsburgh, PA 15213-3891 USA
412-268-2471 - (FAX) 412-268-4323 copyright 2006 Carnegie Mellon
