Matt Moneck from Prof. Jimmy Zhu's group in the DSSC, using the FEI Sirion/Nabity E-Beam Lithography system to expose 75 nm I.D. rings for MRAM device fabrication.
Carnegie Mellon Nanofabrication Facility ECE Department Pittsburgh, PA 15213-3891 USA
412-268-2471 - (FAX) 412-268-4323 copyright 2006 Carnegie Mellon
